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US 8,912,613 B2Granted
Dual-side micro gas sensor and method of fabricating the same
AssigneeElectronics and Telecommunications Research Institute
InventorsHyung-Kun Lee, Seungeon Moon, Nak Jin Choi, Jaewoo Lee
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Abstract
Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.
Claims9
A dual-side micro gas sensor, comprising:
- an elastic layer;
- a heat-generating resistor layer disposed on the elastic layer;
- an interlayer insulating layer disposed on the heat-generating resistor layer;
- an upper sensing layer disposed on the interlayer insulating layer;
- and
- a lower sensing layer attached directly to a bottom surface of the elastic layer such that it receives heat from the heat-generating resistor layer,
- wherein the heat-generating layer is the only heat source for the upper sensing layer and the lower sensing layer.
4 more elements
Dependencies are inferred from the claim text.