Variable resistive memory device and method of fabricating the same
AssigneeSK hynix Inc.
InventorKeun Lee
Life of this patent
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Abstract
Provided are a variable resistive memory device and a method of fabricating the same. The variable resistive memory device includes an interlayer insulating film having an opening therein, the opening exposing a surface of a first electrode which is disposed at a bottom of the opening. A variable resistive layer is formed in the opening and a second electrode is formed on the variable resistive layer. The variable resistive layer has a sidewall that is separated from an inner side surface of the opening to define a gap between the sidewall of the variable resistive layer and the inner side surface of the opening.
Claims14
A method of fabricating a variable resistive memory device, the method comprising:
- forming an interlayer insulating film, the interlayer insulating film having an opening therein, the opening exposing a surface of a first electrode which is disposed at a bottom of the opening;
- forming a sacrificial film on an inner side surface of the opening, the sacrificial film defining a groove through which a surface of the first electrode is exposed;
- filling the groove with a variable resistive material;
- forming a variable resistive layer by removing the variable resistive material film to expose the sacrificial film;
- removing the sacrificial film to form a gap between the inner side surface of the opening and a sidewall of the variable resistive layer;
- and
- forming a second electrode on the variable resistive layer.
Dependencies are inferred from the claim text.