Manufacturing method for pipe-shaped electrode phase change memory
AssigneeMacronix International Co., Ltd.
InventorHsiang-Lan Lung
Life of this patent
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Abstract
A method for manufacturing a memory cell device includes forming a bottom electrode comprising a pipe-shaped member, a top, a bottom and sidewalls having thickness in a dimension orthogonal to the axis of the pipe-shaped member, and having a ring-shaped top surface. A disc shaped member is formed on the bottom of the pipe-shaped member having a thickness in a dimension coaxial with the pipe-shaped member that is not dependent on the thickness of the sidewalls of the pipe-shaped member. A layer of phase change material is deposited in contact with the top surface of the pipe-shaped member. A top electrode in contact with the layer of programmable resistive material. An integrated circuit including an array of such memory cells is described.
Claims14
A memory device, comprising:
- a first electrode comprising a pipe-shaped member having an axis, a first end, a second end and sidewalls having thickness in a dimension orthogonal to the axis of the pipe-shaped member, and having a ring-shaped surface at the second end, and a disc shaped member coupled to the first end of the pipe-shaped member, wherein the disc shaped member comprises a first material and has a thickness in a dimension coaxial with the pipe-shaped member that is not dependent on the thickness of the sidewalls of the pipe-shaped member, and the pipe-shaped member comprises a second material that different than the first material;
- a layer of programmable resistive material;
- the ring-shaped surface of the pipe-shaped member in direct electrical contact with a ring-shaped portion of a surface of the layer of programmable resistive material;
- and
- a second electrode in contact with the layer of programmable resistive material.
A memory device, comprising:
- a first electrode comprising a pipe-shaped member having an axis, a first end, a second end and sidewalls having thickness in a dimension orthogonal to the axis of the pipe-shaped member, and having a ring-shaped surface at the second end, and a disc shaped member coupled to the first end of the pipe-shaped member, wherein the disc shaped member comprises a first material and has a thickness in a dimension coaxial with the pipe-shaped member that is not dependent on the thickness of the sidewalls of the pipe-shaped member, and the pipe-shaped member comprises a second material that different than the first material, the second material constituting the entire pipe-shaped member;
- a layer of programmable resistive material;
- the ring-shaped surface of the pipe-shaped member in direct electrical contact with a ring-shaped portion of a surface of the layer of programmable resistive material;
- and
- a second electrode in contact with the layer of programmable resistive material.
A memory device, comprising:
- a first electrode comprising a pipe-shaped member having an axis, a first end, a second end and sidewalls having thickness in a dimension orthogonal to the axis of the pipe-shaped member, and having a ring-shaped surface at the second end, and a disc shaped member coupled to the first end of the pipe-shaped member;
- the disc shaped member comprising a first material and having a thickness in a dimension coaxial with the pipe-shaped member that is not dependent on the thickness of the sidewalls of the pipe-shaped member;
- the pipe-shaped member comprising a second material that different than the first material, the second material constituting the entire pipe-shaped member;
- the second material having a higher resistivity than the first material;
- a layer of programmable resistive material;
- the ring-shaped surface of the pipe-shaped member in direct electrical contact with a ring-shaped portion of a surface of the layer of programmable resistive material;
- a second electrode in contact with the layer of programmable resistive material;
- the programmable resistive material having an amorphous state;
- the pipe-shaped member having a cylindrical inside surface and an outside surface;
- and
- a thermal insulator inside the inside surface of the pipe-shaped member, the thermal insulator having a thermal conductivity less than the thermal conductivity of the programmable resistive material in the amorphous state.
Dependencies are inferred from the claim text.