Adjustable cathodoluminescence detection system and microscope employing such a system
AssigneesCentre National De La Recherche Scientifique, Universite Paris-Sud 11
InventorsMathieu Kociak, Luiz Fernando Zagonel, Marcel Tence, Stefano Mazzucco
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Abstract
A cathodoluminescence detection system is provided, including a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending the light radiation to an analyzer, a positioner for the collection optic; the positioner including several translation components of the collection optic. Each translation component effects the translation of the collection optic in one dimension of space so that the translation components effect the translation of the collection optic in several dimensions of space.
Claims17
A cathodoluminescence detection system comprising:
- a collection optic collecting light radiation coming from a sample illuminated by a charged particle beam and sending said light radiation to analysis means;
- means for positioning said collection optic;
- said positioning means comprising several translation components of said collection optic;
- and each translation component effecting the translation of said collection optic in one dimension of space so that said translation components effect the translation of the collection optic in several dimensions of space.
Dependencies are inferred from the claim text.