Automated sample orientation
AssigneeFEI Company
InventorJason Arjavac
Life of this patent
Estimating the term…
Abstract
A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample surface are determined using a focusing routine. The locations of the different spots are used to create an image line or an image plane that determines the proper calibrations that are needed. The image line or image plane is then used to calibrate the sample stage so that the sample is aligned substantially normal to the focused ion beam.
Claims14
A method for orienting a sample in a charged particle beam system comprising:
- loading a sample into a vacuum chamber having a charged particle beam;
- placing the sample under a charged particle beam;
- selecting an area of the sample to orient;
- guiding the charged particle beam to at least two different spots on the sample surface;
- focusing the charged particle beam on the at least two different spots;
- determining the distance of each spot from a fixed spot that is substantially eucentric to the objective lens;
- using the distances of each spot to orient the sample so that the sample is oriented normal to the charged particle beam by tilting the sample stage.
A method for aligning a sample in a charged particle beam system comprising:
- loading a sample on a sample stage in a vacuum chamber having a charged particle beam;
- calibrating the sample in a Z-axis in line with the charged particle beam;
- selecting an area of the sample to orient;
- aiming the charged particle beam on a first spot of the area of the sample to orient;
- performing a first focusing routine to define a first X, Y, Z points;
- shifting the charged particle beam in the X-Y plane;
- performing a second focusing routine to define a second X, Y, Z points;
- using the first X, Y, Z points and the second X, Y, Z points to determine the orientation of the sample;
- and
- changing the orientation of the sample stage by moving and/or tilting the sample stage so that the sample is oriented normal to the charged particle beam.
Dependencies are inferred from the claim text.