Method for manufacturing stretchable thin film transistor
AssigneeElectronics and Telecommunications Research Institute
InventorsJae Bon Koo, Chan Woo Park, Soon-Won Jung, Sang Chul Lim, Ji-Young Oh, Bock Soon Na, Hye Yong Chu
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Abstract
Provided is a method for manufacturing a stretchable thin film transistor. The method for manufacturing a stretchable thin film transistor includes forming a mold substrate, forming a stretchable insulator on the mold substrate, forming a flat substrate on the stretchable insulator, removing the mold substrate, forming discontinuous and corrugated wires on the stretchable insulator, forming a thin film transistor connected between the wires, and removing the flat substrate.
Claims13
A method for manufacturing a stretchable thin film transistor, the method comprising:
- forming a mold substrate;
- forming a stretchable insulator on the mold substrate;
- forming a flat substrate on the stretchable insulator;
- removing the mold substrate;
- forming corrugated wires on the stretchable insulator;
- forming a thin film transistor connected between the corrugated wires;
- and
- removing the flat substrate,
- wherein forming the corrugated wires comprises:
- forming discontinuous wires on the stretchable insulator;
- thermally expanding the discontinuous wires and the stretchable insulator, a thermal expansion coefficient of the stretchable insulator being greater than a thermal expansion coefficient of the discontinuous wires;
- and
- quenching the thermally expanded wires and the thermally expanded discontinuous stretchable insulator to form the corrugated wires.
A method for manufacturing a stretchable thin film transistor, the method comprising:
- forming a stretchable insulator on a substrate;
- forming corrugated wires on the stretchable insulator;
- forming a thin film transistor connected to the corrugated wires;
- and
- removing the substrate,
- wherein forming the corrugated wires comprises:
- forming discontinuous wires on the stretchable insulator;
- thermally expanding the discontinuous wires and the stretchable insulator, a thermal expansion coefficient of the stretchable insulator being greater than a thermal expansion coefficient of the discontinuous wires;
- and
- quenching the thermally expanded wires and the thermally expanded discontinuous stretchable insulator to form the corrugated wires.
Dependencies are inferred from the claim text.