Mixer fabrication technique and system using the same
AssigneeMarki Microwave, Inc.
InventorChristopher Ferenc Marki
Life of this patent
Estimating the term…
Abstract
An improved microwave mixer manufactured using multilayer processing includes an integrated circuit that is electrically connected to a top metal layer of a substrate. The microwave mixer includes: a first metal layer; a dielectric substrate on the first metal layer; a second metal layer directly on the substrate, at least two passive circuits arranged on the second metal layer and a top layer metal; a thin dielectric layer on the second metal layer, wherein the top layer metal is directly on the thin dielectric layer; an integrated circuit (IC) attached to the second metal layer, wherein the IC includes at least one combination of non-linear devices, and wherein the IC is directly connected to the passive circuits on the second metal layer; and a protection layer on the IC.
Claims24
A multilayer fabrication method for a microwave mixer, comprising:
- sequentially forming a first metal layer, a substrate, and a second metal layer;
- patterning the substrate and first and second metal layers to form at least one interconnect that electrically contacts the first and second metal layers;
- patterning at least two passive circuits on the second metal layer of the substrate;
- patterning the second metal layer of the substrate to expose one or more portions of the substrate;
- forming a thin dielectric layer on the patterned second metal layer of the substrate, wherein the thin dielectric layer directly contacts the second metal layer and the exposed portion of the substrate;
- processing the thin dielectric layer to form dielectric vias;
- forming a top layer metal directly on the thin dielectric layer, wherein the top layer metal is connected to the first and second metal layers of the substrate by the dielectric vias formed in the thin dielectric layer;
- patterning the top layer metal and a portion of the thin dielectric layer to form the top layer metal of the passive circuits and to expose the substrate;
- attaching an integrated circuit (IC) to the second metal layer of the substrate for the microwave mixer, wherein the IC includes at least one combination of non-linear devices, and wherein the IC is directly connected to the passive circuits on the second metal layer of the substrate;
- and
- forming a protection layer on the IC.
A microwave mixer, comprising:
- a first metal layer;
- a dielectric substrate on the first metal layer;
- a second metal layer directly on the substrate, wherein the substrate includes at least one substrate via electrically contacting the first metal layer and the second metal layer;
- at least two passive circuits arranged on the second metal layer and a top metal layer;
- a thin dielectric layer on the second metal layer, wherein the thin dielectric layer includes dielectric vias, wherein the top layer metal is directly on the thin dielectric layer and electrically connects the first and second metal layers of the substrate using the dielectric vias;
- an integrated circuit (IC) attached to the second metal layer for the microwave mixer, wherein the IC includes at least one combination of non-linear devices, and wherein the IC is directly connected to the passive circuits on the second metal layer;
- and
- a protection layer on the IC.
Dependencies are inferred from the claim text.