Compound semiconductor deposition method and apparatus

A compound semiconductor deposition method of depositing a compound semiconductor of a ternary or higher system on a substrate, the method comprising:

• irradiating propagation light onto the substrate, a photon energy of the propagation light being smaller than a target band gap energy of the compound semiconductor, the target band gap energy being computed from a desired element ratio of the compound semiconductor, and the propagation light being irradiated onto the substrate while depositing the compound semiconductor on the substrate;
• generating near-field light based on the irradiated propagation light from fine particles of the compound semiconductor deposited on the substrate, thereby forming new vibrational levels for the compound semiconductor in multiple stages based on the generated near-field light;
• and
• exciting a component in the compound semiconductor with the propagation light through a vibrational level, among the new vibrational levels, to thereby desorb the component, the component corresponding to a band gap energy of the vibrational level which has a band gap energy equal to or smaller than the photon energy of the propagation light.

A compound semiconductor deposition method of depositing a compound semiconductor of a ternary or higher system on a substrate by promoting a photochemical reaction through irradiation by a first light source of propagation light for deposition to a gas supplied into a reaction chamber, the method comprising:

• irradiating propagation light for desorption by a second light source, wherein a photon energy of the propagation light for desorption is smaller than a target band gap energy of the compound semiconductor, the target band gap energy being computed from a desired element ratio of the compound semiconductor, and wherein the propagation light for desorption is irradiated onto the substrate while depositing the compound semiconductor on the substrate;
• generating near-field light based on the propagation light for deposition irradiated by the first light source from fine particles of the compound semiconductor deposited on the substrate, thereby forming new vibrational levels for the compound semiconductor in multiple stages based on the generated near-field light;
• and
• exciting a component in the compound semiconductor with the propagation light for desorption irradiated by the second light source through a vibrational level, among the new vibrational levels, to thereby desorb the component, the component corresponding to an excitation a band gap energy of the vibrational level which has a band gap energy equal to or smaller than the photon energy of the propagation light for desorption.

A compound semiconductor deposition apparatus for depositing a compound semiconductor of a ternary or higher system on a substrate by promoting a photochemical reaction through irradiation of propagation light for deposition to a gas supplied into a reaction chamber, the apparatus comprising:

• a first light source which irradiates the propagation light for deposition;
• and
• a second light source which irradiates propagation light for desorption;
• wherein photon energy of the propagation light for desorption is smaller than a target band gap energy of the compound semiconductor, the target band gap energy being computed from a desired element ratio of the compound semiconductor, and the propagation light being irradiated onto the substrate while depositing the compound semiconductor on the substrate;
• wherein the propagation light for deposition irradiated by the first light source generates near-field light from fine particles of the compound semiconductor deposited on the substrate, and forms new vibrational levels for the compound semiconductor in multiple stages based on the generated near-field light;
• and
• wherein the propagation light for desorption irradiated by the second light source excites a component in the compound semiconductor through a vibrational level, among the new vibrational levels, to thereby desorb the component, the component corresponding to a band gap energy of the vibrational level which has a band gap energy equal to or smaller than the photon energy of the propagation light for desorption.