Method for manufacturing energy ray detection device
AssigneeCanon Kabushiki Kaisha
InventorYasuhiro Kawabata
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Abstract
In a method for manufacturing an energy ray detection device including a first semiconductor region disposed below a first area on a surface of a semiconductor substrate, a second semiconductor region disposed below a second area on the surface and connected to a contact portion, and a third semiconductor region disposed below a third area on the surface between the first area and the second area, the first semiconductor region and the third semiconductor region are formed on the semiconductor substrate by performing ion implantation through a buffer film that covers the first area and the third area, a portion of the buffer film that covers the third area having a thickness smaller than a portion of the buffer film that covers the first area.
Claims19
A method for manufacturing an energy ray detection device including an active part and a contact portion connected to the active part, the active part including a semiconductor region having a first conductivity type where signal charge generated in accordance with energy rays resides as majority carriers,
- the semiconductor region including
- a first region disposed below a first area on a surface of a semiconductor substrate,
- a second region disposed below a second area on the surface and connected to the contact portion, and
- a third region disposed below a third area on the surface between the first area and the second area, the method comprising:
- forming a buffer film on the semiconductor substrate, the buffer film covering the first area and the third area, a portion of the buffer film that covers the third area having a thickness smaller than a portion of the buffer film that covers the first area;
- and
- forming the first region and the third region, comprising performing ion implantation of impurities having the first conductivity type into the semiconductor substrate through the buffer film.
Dependencies are inferred from the claim text.