Dicing-free LED fabrication
AssigneeTSMC Solid State Lighting Ltd.
InventorsHsing-Kuo Hsia, Chih-Kuang Yu, Gordon Kuo
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AssigneeTSMC Solid State Lighting Ltd.
InventorsHsing-Kuo Hsia, Chih-Kuang Yu, Gordon Kuo
Estimating the term…
Provided is a method of fabricating a light-emitting diode (LED) device. The method includes providing a substrate having opposite first and second sides. A semiconductor layer is formed on the first side of the substrate. The method includes forming a photoresist layer over the semiconductor layer. The method includes patterning the photoresist layer into a plurality of photoresist components. The photoresist components are separated by openings. The method includes filling the openings with a plurality of thermally conductive components. The method includes separating the semiconductor layer into a plurality of dies using a radiation process that is performed to the substrate from the second side. Each of the first regions of the substrate is aligned with one of the conductive components.
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Dependencies are inferred from the claim text.