Manufacturing process of vertical type solid state light emitting device

A manufacturing process of a vertical type solid state light emitting device, comprising the following steps:

• providing a substrate;
• growing an M metal nitride buffer layer on the substrate;
• forming a breakable structure on the M metal nitride buffer layer, wherein the breakable structure contains a plurality of M metal droplet structures;
• forming a first type semiconductor layer, an active layer and a second type semiconductor layer on the breakable structure in sequence;
• forming a second type electrode on the second type semiconductor layer, wherein the first type semiconductor layer, the active layer, the second type semiconductor layer and the second type electrode are stacked to form a light emitting stacking structure;
• damaging the breakable structure to separate the substrate from the light emitting stacking structure, so that a surface of the first type semiconductor layer of the light emitting stacking structure is exposed;
• and
• forming a first type electrode on the surface of the first type semiconductor layer.