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AssigneesFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V., Fraunhofer USA, Inc.
InventorsHans-Joachim Scheibe, Thomas Schuelke, Lars Haubold, Michael Becker, Yaran Mahmut
Estimating the term…
A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.
A coating based on diamond-like carbon which is formed on a substrate, wherein the coating is formed from a plurality of films of diamond-like carbon alternating over one another such that a film which contains no portion or only a much lower portion of doped fluorine alternates with a film which contains fluorine or at least a higher portion of fluorine than the film arranged thereunder or thereabove, and wherein all films are formed with ta-C as a diamond-like carbon, and at least some of the films have elevated portions with trough recesses between the elevated portions to define a wave-like surface.
Dependencies are inferred from the claim text.