Protective coating, a coated member having a protective coating as well as method for producing a protective coating
AssigneeOerlikon Metaplas GmbH
InventorJörg Vetter
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Abstract
The invention relates to a protective coating, having the chemical composition CaSibBdNeOgHlMem, wherein Me is at least one metal of the group consisting of {Al, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W, Y, Sc, La, Ce, Nd, Pm, Sm, Pr, Mg, Ni, Co, Fe, Mn}, with a+b+d+e+g+l+m=1. According to the invention, the following conditions are satisfied: 0.45≦a≦0.98, 0.01≦b≦0.40, 0.01≦d≦0.30, 0≦e≦0.35, 0≦g≦0.20, 0≦l≦0.35, 0≦m≦0.20. The invention relates also to a coated member having a protective coating, as well as to a method for producing a protective coating, in particular a multilayer film for a member.
Claims34
A protective coating, having the chemical composition CaSibBdNeOgHlMem, wherein Me is at least one metal of the group consisting of {Al, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W, Y, Sc, La, Ce, Nd, Pm, Sm, Pr, Mg, Co, Ni, Fe, Mn}, with a+b+d+e+g+l+m=1,
- and
- 0.45≦a≦0.98
- 0.01≦b≦0.40
- 0.02≦d≦0.10
- 0≦e≦0.35
- 0≦g≦0.20
- 1≦l≦0.35
- 0≦m≦0.20, and
- wherein the coating contains amorphous carbon which is not chemically bonded to Si or B at a content that satisfies 3.2≦Ix/Iy≦8.0, wherein Ix represents the peak of intensity of amorphous carbon in Raman spectrum, and Iy represents the maximum intensity in the background in Raman spectrum.
Dependencies are inferred from the claim text.