Electro-deposition of nano-patterns
AssigneeEmpire Technology Development LLC
InventorEzekiel Kruglick
Life of this patent
Estimating the term…
Abstract
The present disclosure generally relates to techniques for electro-depositing nano-patterns. More specifically, systems and methods for fabricating periodic structures in complex nano-patterns are described. An electrical signal may be applied to one or more electrodes that are positioned about a surface of a substrate. The periodicity of the deposited pattern may be influenced by one or more parameters associated with an applied electrical signal, including one or more of frequency, amplitude, period, duty cycle, etc. The weight of each deposited line on the substrate may be influenced by the described parameters, and the shape of the pattern may be influenced by the number, shape, and position of electrodes.
Claims25
A method for electro-depositing a desired pattern on a surface of a substrate comprising:
- providing a substrate in contact with an electrolyte solution containing a material for electroplating;
- positioning a plurality of shaped electrodes at different locations on the surface of the substrate in a closed loop configuration, wherein a polarity associated with the plurality of electrodes is arranged to alternate along the closed loop configuration;
- and
- applying an electrical current signal to at least one of the plurality of electrodes, wherein applying an electrical current signal to the at least one electrode generates equi-potential lines and forms a conductive path along the closed loop configuration,
- wherein the electro-depositing occurs along the equi-potential lines resulting in a pattern extending along the equipotential lines in a plane parallel to a plane defined by the surface of the substrate, and
- wherein the pattern includes a curved line.
Dependencies are inferred from the claim text.