System for batch processing of magnetic media
AssigneeApplied Materials, Inc.
InventorsSteven Verhaverbeke, Jose Antonio Marin
Life of this patent
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AssigneeApplied Materials, Inc.
InventorsSteven Verhaverbeke, Jose Antonio Marin
Estimating the term…
A method and apparatus for processing multiple substrates simultaneously is provided. Each substrate may have two major active surfaces to be processed. The apparatus has a substrate handling module and a substrate processing module. The substrate handling module has a loader assembly, a flipper assembly, and a factory interface. Substrates are disposed on a substrate carrier at the loader assembly. The flipper assembly is used to flip all the substrates on a substrate carrier in the event two-sided processing is required. The factory interface positions substrate carriers holding substrates for entry into and exit from the substrate processing module. The substrate processing module comprises a load-lock, a transfer chamber, and a plurality of processing chambers, each configured to process multiple substrates disposed on a substrate carrier.
A system for processing magnetic media, comprising a substrate handling module, comprising:
Dependencies are inferred from the claim text.