Methods of making molybdenum titanium sputtering plates and targets
AssigneeH.C. Starck GmbH
InventorsMark E. Gaydos, Prabhat Kumar, Steve Miller, Norman C. Mills, Gary Rozak, Rong-Chein Richard Wu
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Abstract
Molybdenum titanium sputter targets are provided. In one aspect, the targets are substantially free of the β(Ti, Mo) alloy phase. In another aspect, the targets are substantially comprised of single phase β(Ti, Mo) alloy. In both aspects, particulate emission during sputtering is reduced. Methods of preparing the targets, methods of bonding targets together to produce large area sputter targets, and films produced by the targets, are also provided.
Claims2
A molybdenum-titanium sputtering target consisting essentially of molybdenum and titanium, wherein the concentration of any β(Mo, Ti) alloy phase is from greater than 0% up to 15% by volume, wherein the target has a density that is at least 95% of theoretical density, and wherein the sputtering target includes the titanium at a concentration of 40-60 atomic percent, based on the total number of titanium and molybdenum atoms in the sputtering target.
Dependencies are inferred from the claim text.