Method and apparatus for inducing turbulent flow of a processing chamber cleaning gas

An apparatus, comprising:

• a plate of optically transparent material;
• a ring disposed around a periphery of the plate;
• and
• a plurality of turbulence-inducing structures formed on a surface of the plate.

An apparatus for inducing turbulent flow within a processing chamber, comprising:

• a circular ring;
• a central hub located within the same plane as the circular ring, wherein the circular ring and the central hub comprise an optically-transparent material;
• a first set of turbulence-inducing structures extending between the central hub and the circular ring, wherein openings are located between each turbulence-inducing structure of the first set of turbulence-inducing structures;
• and
• a second set of turbulence-inducing structures extending between the first set of turbulence-inducing structures and the circular ring.

A processing chamber, comprising:

• a chamber body;
• a showerhead disposed within the chamber body;
• a substrate support disposed within the chamber body;
• and
• a cleaning plate disposed on the substrate support adjacent the showerhead, the cleaning plate comprising:
• a circular ring;
• a central hub located within the same plane as the circular ring;
• and
• a first set of turbulence-inducing structures extending between the central hub and the circular ring, wherein openings are located between each turbulence-inducing structure of the first set of turbulence-inducing structures, and wherein the turbulence inducing structures comprise an optically-transparent material.