Capacitive accelerometer

A capacitive accelerometer comprising:

• a substrate;
• and
• a first semiconductor layer disposed on the substrate, the first semiconductor layer comprising:
• a first mass;
• at least two first anchors respectively located on at least one side of the first mass corresponding to a first axis;
• two first elastic members respectively connected to the first mass and the corresponding first anchor in a manner of bending back and forth parallel to the first axis, for making the first mass move elastically along a second axis when a force is applied to the first mass in the second axis;
• at least one first combo capacitor set connected to at least one side of the first mass corresponding to the first axis;
• at least two second anchors respectively located on at least one side of the first mass corresponding to the second axis;
• two second elastic members respectively connected to the first mass and the corresponding second anchor in a manner of bending back and forth parallel to the second axis, for making the first mass move elastically along the first axis when a force is applied to the first mass in the first axis;
• and
• at least one second combo capacitor set connected to at least one side of the first mass corresponding to the second axis;
• wherein the bending times of the two first elastic members are different from each other, and the first axis is perpendicular to the second axis.

A capacitive accelerometer comprising:

• a substrate;
• and
• a first semiconductor layer disposed on the substrate, the first semiconductor layer comprising:
• a first mass;
• at least one first anchor located on at least one side of the first mass corresponding to a first axis;
• a first elastic member having a first bending structure and a first step structure, the first bending structure being connected to the first anchor in a manner of bending back and forth corresponding to the first axis, the first step structure being connected between the first mass and the first bending structure and having a plurality of steps continuously formed thereon;
• at least one first combo capacitor set connected to at least one side of the first mass corresponding to the first axis;
• at least one second anchor located on at least one side of the first mass corresponding to a second axis;
• a second elastic member having a second bending structure and a second step structure, the second bending structure being connected to the second anchor in a manner of bending back and forth corresponding to the second axis, the second step structure being connected between the first mass and the second bending structure and having a plurality of steps continuously formed thereon, at least two protruding blocks being formed on the first mass corresponding to the first step structure and the second step structure respectively;
• and
• at least one second combo capacitor set connected to at least one side of the first mass corresponding to the second axis;
• wherein the first axis is perpendicular to the second axis.

A capacitive accelerometer comprising:

• a substrate;
• and
• a first semiconductor layer disposed on the substrate, the first semiconductor layer comprising:
• a first mass;
• at least two first combo capacitor sets connected to at least one side of the first mass corresponding to a first axis;
• at least two first anchors disposed between the two first combo capacitor sets and located at the same side where the at least two first combo capacitor sets are connected to the first mass;
• at least two first elastic members located between the at least two first combo capacitor sets and located at the same side where the at least two first combo capacitor sets are connected to the first mass, each first elastic member being connected between the first mass and the corresponding first anchor in a manner of bending back and forth corresponding to the first axis;
• at least two second combo capacitor sets connected to at least one side of the first mass corresponding to a second axis;
• at least one second anchor disposed between the two second combo capacitor sets;
• and
• a second elastic member connected between the first mass and the second anchor in a manner of bending back and forth corresponding to the second axis;
• wherein the first axis is perpendicular to the second axis.