Vibration gyro element
AssigneeMurata Manufacturing Co., Ltd.
InventorToshimaro Yoneda
Life of this patent
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Abstract
A vibration gyro element that includes a piezoelectric substrate configured to have a shape that is line-symmetrical about each of the two detection axes X1 and X2 which are parallel to a principal surface and orthogonal to each other; and a plurality of pairs of principal surface electrodes which are provided on front and back principal surfaces of the piezoelectric substrate. The piezoelectric substrate is formed from a monocrystal classified into the trigonal system 3m point group, and a crystal axis X of a crystal coordinate system (X, Y, Z) coincides with an axis that equally divides between the two detection axes X1 and X2.
Claims7
A vibration gyro element comprising:
- a piezoelectric substrate that is line-symmetrical about each of two detection axes, the detection axes being parallel to at least one of a first surface and a second surface of the piezoelectric substrate and orthogonal to each other;
- and
- a plurality of pairs of electrodes provided on the first and the second surfaces of the piezoelectric substrate,
- wherein the vibration gyro element is configured such that, when a frequency signal is applied between at least a first pair of the plurality of pairs of surface electrodes, the piezoelectric substrate vibrates in a direction normal to one of the first and second surfaces, a Coriolis force applied to the piezoelectric substrate by rotation about each detection axis is detected on the basis of a voltage excited in at least a second pair of the plurality of pairs of surface electrodes, and wherein
- the piezoelectric substrate comprises a monocrystal classified into a trigonal system 3m point group, and a crystal axis X of a crystal coordinate system (X, Y, Z) coincides with any of axes each of which equally divides between two detection axes.
Dependencies are inferred from the claim text.