Method of manufacturing inkjet printhead with self-clean ability
AssigneeXerox Corporation
InventorsKock-Yee Law, Hong Zhao
Life of this patent
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Abstract
Described is a process for producing an inkjet printhead comprising an aperture face having an oleophobic surface. The process includes forming an aperture plate by disposing a silicon layer on an aperture plate; using photolithography to create a textured pattern on an outer surface of the silicon layer; and chemically modifying the textured surface by disposing a conformal, oleophobic coating on the textured surface. The oleophobic aperture plate may be used as a front face surface for an inkjet printhead.
Claims22
A method for producing an inkjet printhead comprising an aperture plate having an oleophobic surface, the method comprising:
- disposing a silicon layer on an aperture plate;
- using photolithography to create a textured pattern in the silicon layer on the aperture plate to form a textured silicon surface;
- and
- chemically modifying the textured silicon surface by depositing a conformal oleophobic coating material on the textured surface,
- wherein the using photolithography step further comprises using multiple etching cycles, each of the multiple etching cycles comprising depositing a protective passivation layer on the silicon layer, etching to remove at least a portion of the protective passivation layer, and etching the silicon layer isotropically.
Dependencies are inferred from the claim text.