Formed article, method for producing the formed article, member for electronic device, and electronic device
AssigneeLintec Corporation
InventorsYuta Suzuki, Takeshi Kondo, Shinichi Hoshi
Life of this patent
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AssigneeLintec Corporation
InventorsYuta Suzuki, Takeshi Kondo, Shinichi Hoshi
Estimating the term…
A formed article includes a gas barrier layer that is formed of a material including at least an oxygen atom and a silicon atom, a surface area of the gas barrier layer having an oxygen atom content rate of 60 to 75%, a nitrogen atom content rate of 0 to 10%, and a silicon atom content rate of 25 to 35%, based on the total content of oxygen atoms, nitrogen atoms, and silicon atoms, and having a film density of 2.4 to 4.0 g/cm3. A method of producing a formed article includes implanting ions into a surface layer part of a polysilazane compound-containing layer of a formed body that includes the polysilazane compound-containing layer in its surface layer part. An electronic device member includes the formed article. An electronic device includes the electronic device member. The formed article exhibits an excellent gas barrier capability, excellent folding resistance, and excellent transparency.
A formed article comprising a gas barrier layer that is formed of a material including at least an oxygen atom, a nitrogen atom, and a silicon atom, an area from the surface to a point 5 nm deep from the surface of the gas barrier layer having an oxygen atom content rate of 60 to 75%, a nitrogen atom content rate of 0.1 to 10%, and a silicon atom content rate of 25 to 35%, based on the total content of oxygen atoms, nitrogen atoms, and silicon atoms, and
Dependencies are inferred from the claim text.