Method of forming metal oxide hardmask

A method of forming a metal oxide hardmask on a template, comprising:

• providing a template constituted by a photoresist or amorphous carbon formed on a substrate;
• depositing by atomic layer deposition (ALD) a metal oxide hardmask on the template constituted by a material having a formula SixM(1-x)Oy wherein M represents at least one metal element, x is less than one including zero, and y is approximately two or a stoichlometrically-determined number, wherein M is a metal whose fluoride has a vapor pressure of more than 100 Pa at a temperature for cleaning a reactor used for depositing the metal oxide hard mask;
• and wherein the ALD is plasma enhanced ALD(PE-ALD), wherein the depositing of the metal oxide hardmask comprises supplying a precursor for the metal oxide hardmask in pulses and applying RF power in pulses between the pulses of the precursor, wherein at least one reactant gas is supplied while applying the RF power, wherein the precursor is a metal-containing alkylamino compound or metal-containing alkoxy compound.