Actinic ray-sensitive or radiation-sensitive resin composition and method of forming pattern with the composition

An actinic ray-sensitive or radiation-sensitive resin composition comprising any of the compounds of general formula (I) below, a resin soluble in an alkali developer and an acid crosslinking agent capable of crosslinking with the resin soluble in an alkali developer by the action of an acid;

• wherein:
• Ar represents a benzene ring that may have a substituent other than the -(A-B) groups and two o-positions of the benzene ring are substituted with the -(A-B) groups;
• n is an integer of 2 to 5;
• A represents any one, or a combination of two or more members selected from a single bond, an alkylene group, —O—, —S—, —C(═O)—, —S(═O)—, —S(═O)2— and —OS(═O)2—, provided that —C(═O)O— is excluded;
• B represents a group containing a noncyclic hydrocarbon group having 5 or more carbon atoms or a cycloaliphatic group having 4 or more carbon atoms wherein either a tertiary or a quaternary carbon atom is contained,
• the two or more -(A-B) groups may be identical to or different from each other;
• and
• M+ represents an organic onium ion.

A compound of general formula (I) below;

• wherein:
• Ar represents an aromatic ring that may have a substituent other than the -(A-B) groups;
• n is an integer of 2 to 5;
• A represents a single bond;
• B represents a group containing a cycloaliphatic group having 4 or more carbon atoms wherein either a tertiary or a quaternary carbon atom is contained,
• the two or more -(A-B) groups may be identical to or different from each other;
• and
• M+ represents an organic onium ion, and
• wherein a substituent other than -(A-B) groups which aromatic ring Ar in general formula (I) may have is selected from a group consisting of:
• alkoxy group, an aryloxy group, an alkylthioxy group, an arylthioxy group, an alkoxycarbonyl group, a phenoxycarbonyl group, and acetoxy group, a liner or branched alkyl group, an alkenyl group, an alkynyl group, an aryl group, an acyl group, a hydroxyl group, a carboxyl group and a sulfonate group.