Active vibration isolation system
AssigneeTechnical Manufacturing Corporation
InventorsEmil Kraner, Antonio Lopes
Life of this patent
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Abstract
An active damping system for use in connection with a vibration isolation system includes an intermediate mass between a base and an isolated payload. The intermediate mass is supported by at least one support element which also supports at least substantially all of the static forces of the isolated payload. An actuator dampens and isolates dynamic forces acting on the intermediate mass from the isolated payload. The active damping system also includes a payload support element and a passive damping element, both of which are coupled at one end to the payload platform and at an opposite end to the intermediate mass. A sensor is affixed to the intermediate mass to generate a feedback signal to a processor coupled to the actuator.
Claims28
An active damping system configured to be positioned between a base and an isolated payload that generates a static force, said active damping system comprising:
- an intermediate mass;
- a payload support element configured to be coupled between the isolated payload and said intermediate mass;
- an intermediate mass support element configured to be coupled between said intermediate mass and the base, said intermediate mass support element configured to support substantially all of the static force of the isolated payload;
- an active damping actuator having one end coupled to said intermediate mass and an opposite end configured to be coupled to said base, wherein the active damping actuator exhibits a stiffness at least two orders of magnitude less than a stiffness exhibited by the intermediate mass support element;
- a first sensor configured to generate a first signal responsive to movement of said intermediate mass caused by dynamic forces;
- and
- a compensation module configured to be coupled to said first sensor and said active damping actuator, said compensation module configured to respond to said first sensor signal by actuating said active damping actuator to dampen said dynamic forces acting on said intermediate mass.
A method for vibrationally isolating a payload, the method comprising:
- coupling a payload support element between the payload and an intermediate mass;
- coupling an intermediate mass support element between the intermediate mass and a base, wherein the intermediate mass support element is configured to support substantially all of a static force generated by the payload;
- coupling an active damping actuator between the intermediate mass and the base, wherein the active damping actuator exhibits a stiffness at least two orders of magnitude less than a stiffness exhibited by the intermediate mass support element;
- generating, by a first sensor, a first signal responsive to movement of the intermediate mass caused by dynamic forces;
- and
- dampening, by a compensation module coupled to the first sensor and the active damping actuator, dynamic forces acting on said intermediate mass, wherein the dampening comprises actuating the active damping actuator responsive to the first sensor signal.
Dependencies are inferred from the claim text.