Metal nanopillars for surface-enhanced Raman spectroscopy (SERS) substrate and method for preparing same
AssigneesPhansco Corp., National Taipei University of Technology
InventorsYi-Jun Jen, Ching-Wei Yu
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Abstract
Disclosed herein describes an SERS sensing substrate comprising upright metal nanostructures made by using oblique angle deposition (OAD) collocating with self-rotation substrate, wherein said upright nanostructures include individual upright nanopillars and metal/dielectric multilayered upright nanopillar stacks. The SERS sensing substrate exhibits higher and enhanced adsorption spectra for unpolarized incident rays in the visible and infrared wavelength regimes.
Claims14
A method for making surface enhanced Raman spectroscopy (SERS) substrate at least having metal nanopillars, comprising:
- on a rotating substrate along a normal line of the substrate, forming metal nanopillars by a oblique angle deposition process, the metal nanopillars having a configuration in which nanopillars are about parallel to the normal line of the substrate.
A surface enhanced Raman spectroscopy (SERS) sensing substrate, comprising:
- a substrate;
- at least one layer of metal nanopillar structure formed one the substrate, the metal nanopillar structure has a configuration in which the metal nanopillar structure are about parallel to a normal line of the substrate.
A method for making a surface enhanced Raman spectroscopy (SERS) substrate having metal nanopillar selectively interleaving with dielectric nanopillar, comprising:
- on a rotational substrate along a normal line of the substrate, producing stack of multiple layers of nanopillar structure of metal nanopillar/dielectric nanopillar material by oblique angle deposition process, the substrate has a configuration in which the multiple layers of nanopillar structure of metal nanopillar/dielectric nanopillar material are about parallel to a normal line of the substrate.
A surface enhanced Raman spectroscopy (SERS) sensing substrate comprising:
- a substrate;
- a stack of multiple layers of nanopillar metal/nanopillar dielectric material, selectively interleaving with each other, formed on the substrate, the substrate has a configuration in which the multiple layers of nanopillar metal/nanopillar dielectric material are about parallel to a normal line of the substrate.
Dependencies are inferred from the claim text.