Layout optimization for integrated design
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHuang-Yu Chen, Yuan-Te Hou, Yu-Hsiang Kao, Ken-Hsien Hsieh, Ru-Gun Liu, Lee-Chung Lu
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Abstract
A method for laying out a target pattern includes assigning a keep-out zone to an end of a first feature within a target pattern, and positioning other features such that ends of the other features of the target pattern do not have an end within the keep-out zone. The target pattern is to be formed with a corresponding main feature and cut pattern.
Claims19
A method for adjusting a layout design of a target pattern, the method comprising:
- assigning a keep-out zone to an end of a first feature within a target pattern, the target pattern having a restricted design rule layout;
- determining, by using a computer, that an end of a second feature within the target pattern is within the keep-out zone;
- and
- modifying the target pattern such that the end of the second feature is not within the keep-out zone;
- determining that an end of a third feature within the target pattern is within the keep-out zone;
- and
- modifying the target pattern such that the end of the third feature is not within the keep-out zone
- wherein the target pattern is to be formed with a corresponding main pattern and cut pattern.
A computer system comprising:
- a processor;
- and
- a memory comprising a set of computer readable instructions that when executed by the processor, cause the system to:
- assign a keep-out zone to an end of a first target feature within a target pattern, the target pattern having a restricted design rule layout;
- determine that an end of a second target features within the target pattern is within the keep-out zone;
- and
- modify the target pattern such that no ends of the second target features are within the keep-out zone;
- determining that an end of a third feature within the target pattern is within the keep-out zone;
- and
- modifying the target pattern such that the end of the third feature is not within the keep-out zone,
- wherein the target pattern is to be used with a corresponding main pattern and cut pattern.
A method for modifying a layout design of a target pattern, the method comprising:
- assigning a keep-out zone to an end of a first feature within the target pattern, the first feature including a first end, a first edge, and a first cut pattern;
- upon a condition in which a second end of a second feature in the target pattern lies within the keep-out zone, positioning, by using a computer, the second feature in the target pattern such that the second end does not lie within the keep-out zone
- upon a condition in which a third end of a third feature in the target pattern lies within the keep-out zone, positioning the third feature in the target pattern such that the third end does not lie within the keep-out zone.
Dependencies are inferred from the claim text.