Micromechanical component and a method for operating a micromechanical component
AssigneeRobert Bosch GmbH
InventorsStefan Pinter, Joerg Muchow, Joachim Fritz, Christoph Friese
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AssigneeRobert Bosch GmbH
InventorsStefan Pinter, Joerg Muchow, Joachim Fritz, Christoph Friese
Estimating the term…
A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.
A micromechanical component, comprising:
A method for operating a micromechanical component having a light window and a mirror element configured to be adjustable with respect to the light window of the micromechanical component from a first position about at least one axis of rotation into at least one second position, comprising:
A method for operating a micromechanical component having a light window and a mirror element configured to be adjustable with respect to the light window of the micromechanical component from a first position about at least one axis of rotation into at least one second position, comprising:
A method for operating a micromechanical component having a light window and a mirror element configured to be adjustable with respect to the light window of the micromechanical component from a first position about at least one axis of rotation into at least one second position, comprising:
A method for operating a micromechanical component having a light window and a mirror element configured to be adjustable with respect to the light window of the micromechanical component from a first position about at least one axis of rotation into at least one second position, comprising:
Dependencies are inferred from the claim text.