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US 8,896,840 B2Granted
Interferometric method and digital holographic microscope
AssigneeCanon Kabushiki Kaisha
InventorsIsao Matsubara, Chung-Chieh Yu, Yasuyuki Unno, William Dallas
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Abstract
An interferometric method for detecting information about a sample includes emitting a laser beam; splitting the laser beam into a reference beam and an object beam; transmitting the object beam through the sample in an incident angle; combining the reference beam with the object beam passed through the sample to form an interference pattern; detecting the interference pattern, and non-linearly scanning the object beam in order to detect a plurality of interference patterns.
Claims8
An interferometric method for detecting information about a sample comprising;
- emitting a laser beam;
- splitting the laser beam into a reference beam and an object beam;
- transmitting the object beam through the sample at an incident angle;
- combining the reference beam with the object beam passed through the sample to form an interference pattern;
- detecting the interference pattern, and
- non-linearly scanning the object beam in order to detect a plurality of interference patterns and to reconstruct a three-dimensional image of the sample.
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Dependencies are inferred from the claim text.