Test apparatus for reflective cavity characterization
AssigneeApplied Materials, Inc.
InventorsJoseph M. Ranish, Joseph Johnson, Mehran Behdjat
Life of this patent
Estimating the term…
Abstract
An apparatus for reflectivity measurement is provided. The apparatus generally measures reflectivity characteristics of a reflective surface, such as a reflective cavity of a light array. The apparatus generally comprises a body defining a volume and a light emitting element disposed outside the volume. A sensor coupled to the body detects light reflected from a reflective surface. Various embodiments provide positioning of the apparatus relative to a light array having a reflective cavity.
Claims16
An apparatus for measuring reflectivity, comprising:
- a body defining a volume, the body having an opening;
- a stop located on the body opposite the opening,
- an energy transmitting element coupled to and extending from the stop, the energy transmitting element extending through the body and through the opening;
- a light emitting element coupled to the energy transmitting element, the light emitting element located outside the body;
- a light sensor coupled to the body;
- and
- one or more support elements coupled to and extending from the body.
An apparatus for measuring reflectivity, comprising:
- a spherical body having a flat bottom surface, the flat bottom surface having an opening;
- an optical fiber coupled to a stop located on the body opposite the opening;
- a light transmitting element having a reflective sheath coupled to and extending from the stop, the light transmitting element extending through the spherical body and through the opening;
- a diffuse light emitting element coupled to the light transmitting element, the light emitting element located outside the spherical body;
- a light sensor coupled to the spherical body;
- and
- one or more support elements coupled to and extending from the spherical body.
Dependencies are inferred from the claim text.