Optical gas sensor
AssigneeIndustrial Technology Research Institute
InventorsJing-Yuan Lin, Shang-Chian Su
Life of this patent
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Abstract
In the optical gas sensor of the application, a three-dimensional reaction chamber structure is used to replace the traditional simple structure, so that the performance of the gas sensor can be enhanced in a wafer-level size. Besides, a light source, a reaction chamber and a light detector are integrated into one wafer in an exemplary embodiment, so as to achieve the wafer-level integration. In addition, the optical gas sensor can detect various gases simultaneously and has wide application in fields such as home environment monitoring, industrial safety, and disease diagnosis and treatment.
Claims11
An optical gas sensor, comprising:
- a substrate;
- a light source, disposed in the substrate;
- at least one light detector, disposed in the substrate;
- and
- at least one reaction chamber structure, disposed in the substrate and connected between the light source and the light detector,
- wherein the distance from the light source to the light detector is d, and a shortest travel path of a light from the light source to the light detector through the reaction chamber structure is greater than d,
- wherein the at least one reaction chamber structure is composed of a first sub-substrate and a second sub-substrate, the first sub-substrate has a plurality of convex portions and concave portions disposed alternately, the second sub-substrate has a plurality of convex portions and concave portions disposed alternately, and
- wherein the convex portions of the first sub-substrate correspond to the concave portions of the second sub-substrate, and the concave portions of the first sub-substrate correspond to the convex portions of the second sub-substrate.
Dependencies are inferred from the claim text.