Low offset vertical Hall device and current spinning method
AssigneeInfineon Technologies AG
InventorsUdo Ausserlechner, Mario Motz
Life of this patent
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Abstract
One embodiment of the present invention relates to a vertical Hall-effect device. The device includes at least two supply terminals arranged to supply electrical energy to the first Hall-effect region; and at least one Hall signal terminal arranged to provide a first Hall signal from the first Hall-effect region. The first Hall signal is indicative of a magnetic field which is parallel to the surface of the semiconductor substrate and which acts on the first Hall-effect region. One or more of the at least two supply terminals or one or more of the at least one Hall signal terminal comprises a force contact and a sense contact.
Claims9
A vertical Hall-effect sensor system disposed on a semiconductor substrate, comprising:
- a first conductive Hall-effect region arranged beneath a surface of the semiconductor substrate;
- at least two supply terminals arranged to supply electrical energy to the first Hall-effect region;
- at least one Hall signal terminal arranged to provide a first Hall signal from the first Hall-effect region, the first Hall signal being indicative of a magnetic field which is parallel to the surface of the semiconductor substrate and which acts on the first Hall-effect region;
- wherein one or more of the at least two supply terminals or one or more of the at least one Hall signal terminal comprises a force contact and a sense contact;
- and
- a feedback control circuit comprising:
- an output connected to the force contact and having a first impedance,
- an input connected to the sense contact and having a second impedance, the second impedance being higher than the first impedance, and
- a feedback loop to adjust a potential on the output of the feedback control circuit until a potential on the input of the feedback control circuit is equal to a reference potential.
Dependencies are inferred from the claim text.