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US 8,896,188 B2Granted
Resonator electrodes and related methods and apparatus
AssigneeSand 9, Inc.
InventorsJan H. Kuypers, Florian Thalmayr, Alexei Gaidarzhy, Guiti Zolfagharkhani
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Abstract
Resonator structures and electrodes are described, as well as methods for manufacturing the same. Resonator electrodes may be formed using two or more photolithographic steps and masks, with different masks being used to define different features of the electrodes. The masks may create self-aligned electrodes, which can be aligned with one or more anchors of the resonator.
Claims11
A mechanical resonating structure, comprising:
- an active layer;
- and
- a self-aligned electrode layer,
- wherein the self-aligned electrode layer has a periphery substantially matching a periphery of the active layer.
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A mechanical resonating structure, comprising:
- an active layer;
- a self-aligned electrode layer;
- and
- self-aligned electrical connections between the self-aligned electrode layer and an electrical port on a substrate to which the mechanical resonating structure is connected.
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A mechanical resonating structure, comprising:
- an active layer;
- and
- a self-aligned electrode layer,
- wherein a periphery of the self-aligned electrode layer is substantially coincident with a periphery of all layers below the active layer.
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Dependencies are inferred from the claim text.