Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit substrate, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsHaruki Ito, Nobuaki Hashimoto
Life of this patent
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AssigneeSeiko Epson Corporation
InventorsHaruki Ito, Nobuaki Hashimoto
Estimating the term…
A semiconductor device includes: a semiconductor substrate including a first face and a second face on a side opposite to the first face; an external connection terminal formed on the first face of the semiconductor substrate; a first electrode formed on the first face of the semiconductor substrate and electrically connected to the external connection terminal; an electronic element formed on or above the second face of the semiconductor substrate; a second electrode electrically connected to the electronic element and having a top face and a rear face; a groove portion formed on the second face of the semiconductor substrate and having a bottom face including at least part of the rear face of the second electrode; and a conductive portion formed in the groove portion and electrically connected to the rear face of the second electrode.
A semiconductor device, comprising:
An electronic component comprising:
Dependencies are inferred from the claim text.