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US 8,896,093 B2Granted
Circuit configuration and manufacturing processes for vertical transient voltage suppressor (TVS) and EMI filter
AssigneeAlpha and Omega Semiconductor Incorporated
InventorsShekar Mallikararjunaswamy, Madhur Bobde
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Abstract
A vertical TVS (VTVS) circuit includes a semiconductor substrate for supporting the VTVS device thereon having a heavily doped layer extending to the bottom of substrate. Deep trenches are provided for isolation between multi-channel VTVS. Trench gates are also provided for increasing the capacitance of VTVS with integrated EMI filter.
Claims12
A multi-channel vertical transient voltage suppressing (VTVS) with integrated EMI filter device comprising:
- a semiconductor substrate comprising a heavily doped layer of a first conductivity type extending to a bottom surface of said semiconductor substrate contacting a bottom electrode on a bottom surface of the semiconductor substrate;
- an epitaxial layer supported on top of the semiconductor substrate;
- a first channel comprises an input electrode connected to a first dopant region of a second conductivity type near a top surface of said epitaxial layer forming a first vertical PN junction with the epitaxial layer;
- a second channel comprises an output electrode connected to a second dopant region of the second conductivity type disposed near the top surface of said epitaxial layer at a lateral distance away from the first dopant region forming a second vertical PN junction with the epitaxial layer;
- and
- an insulated conductive region functioning as a resistor disposed on top of the epitaxial layer electrically connected in series between said input electrode and said output electrode.
3 more elements
Dependencies are inferred from the claim text.