Ultraviolet light generating target, electron-beam-excited ultraviolet light source, and method for producing ultraviolet light generating target
AssigneeHamamatsu Photonics K.K.
InventorsYoshinori Honda, Fumitsugu Fukuyo, Takashi Suzuki, Norio Ichikawa, Takeaki Hattori, Koji Kawai, Shucheng Chu
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Abstract
An ultraviolet light generating target 20 includes a substrate 21 made of sapphire, quartz or rock crystal; and a Pr:LuAG polycrystalline film 22, provided on the substrate 21, that generates ultraviolet light upon receiving an electron beam. By using a Pr:LuAG polycrystal as the target, the ultraviolet light generating efficiency can be increased more remarkably than when a Pr:LuAG single crystal film is used.
Claims6
An ultraviolet light generating target, comprising:
- a substrate compring sapphire, quartz or rock crystal;
- and
- a Pr:LuAG polycrystalline film provided on the substrate and generating ultraviolet light upon receiving an electron beam.
A method for producing an ultraviolet light generating target, comprising:
- a first step of depositing a Pr:LuAG film on a substrate comprising sapphire, quartz or rock crystal;
- and
- a second step of performing polycrystallization through a heat treatment of the Pr:LuAG film.
Dependencies are inferred from the claim text.