High efficiency secondary and back scattered electron detector
AssigneeHermes Microvision, Inc.
InventorsZhibin Wang, Wei He, Qingpo Xi, Shuai Li, Fumin He
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Abstract
An assembly for a charged particle detection unit is described. The assembly comprises a scintillator disc, a partially coated light guide a thin metal tube for allowing the primary charged particle beam to pass through and a photomultiplier tube (PMT). The shape of scintillator disc and light guide are redesigned to improved the light signal transmission thereafter enhance the light collection efficiency. A light guide with a conicoidal surface over an embedded scintillator improved the light collection efficiency of 34% over a conventional design.
Claims26
A charged particle detection device, comprising:
- a scintillator disc, with a center hole, to collect and convert received charged particles into photons;
- a light guide, to transmit said photons, comprising:
- a conicoidal surface portion;
- a plan surface portion;
- and
- a through hole;
- a metal tube, for permitting a charged particle beam to pass through;
- and
- a photomultiplier tube (PMT), cohered with the end of said light guide to receive said photons from said light guide.
A charged particle detection device, comprising:
- a scintillator disc, to collect and convert received charged particles into photons;
- a light guide, to transmit said photons, comprising:
- a conicoidal surface portion;
- and
- a plan surface portion;
- and
- a photomultiplier tube (PMT), cohered with the end of said light guide to receive said photons from said light guide;
- wherein said charged particles are directed to said scintillator disc by a Wien filter.
Dependencies are inferred from the claim text.