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US 8,895,923 B2Granted
System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing
AssigneeDCG Systems, Inc.
InventorsVladimir A. Ukraintsev, Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders
Life of this patent
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Abstract
A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
Claims20
A system for performing sample probing, comprising:
- a topography microscope configured to:
- receive three-dimensional coordinates for a sample based on at least three fiducial marks;
- receive said sample mounted in a holder;
- and
- navigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates.
2 more elements
A method of performing sample probing, comprising:
- characterizing a sample to generate three-dimensional coordinates based on at least three fiducial marks;
- aligning said sample based on said at least three fiduciary marks;
- and
- navigating to a location on said sample based on said three-dimensional coordinates and said at least three fiduciary marks.
1 more element
A system for performing sample probing, comprising:
- a three-dimensional microscope configured to generate three-dimensional coordinates of a sample based on at least three fiducial marks;
- and
- a topography microscope configured to:
- receive said three-dimensional coordinates for said sample based on at least three fiducial marks;
- receive said sample mounted in a holder;
- and
- navigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates.
4 more elements
Dependencies are inferred from the claim text.