Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus
AssigneeDelmic B.V.
InventorsPieter Kruit, Jacob Pieter Hoogenboom, Aernout Christiaan Zonnevylle
Life of this patent
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Abstract
An inspection apparatus is provided comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8) equipped with a source (7) for emitting a primary beam (9) of radiation to a sample (10) in a sample holder. The apparatus may comprise a detector (8) for detection of secondary radiation (11) backscattered from the sample and induced by the primary beam. The optical microscope is equipped with an light collecting device (2) to receive in use luminescence light (12) emitted by the sample and to focus it on a photon-detector (4).
Claims17
Method of operating an inspection apparatus (1) comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8), comprising the steps of:
- directing light from a light source (15) to the sample (10), the sample comprising at least one emitter, in order to excite the at least one emitter, to emit luminescence light;
- and,
- directing a primary beam (9), comprising a focused electron or ion beam, to said sample,
- characterized in that:
- modification of the luminescence light (12) as induced by the primary beam (9) is detected.
Inspection apparatus (1) comprising in combination at least an optical microscope (2, 3, 4) and an ion- or electron microscope (7, 8) equipped with a source (7) for emitting a primary beam (9) of radiation, comprising a focused electron or ion beam, to a sample (10) in a sample holder, the sample comprising at least one emitter,
- wherein it is embodied with a light source (15) and ancillary means (16, 17, 18, 19, 20, 21) for directing light to the
- sample and excite the at least one emitter to emit luminescence light (12) and to enable its detection by the optical microscope (2, 4),
- and wherein the optical microscope (2, 3, 4) is equipped with a light collecting device (2) to receive luminescence light (12) emitted by the emitter and to focus it on a photon-detector (4),
- wherein modification of luminescence light (12) as induced by the primary beam (9) is detected.
Dependencies are inferred from the claim text.