Transistor employing vertically stacked self-aligned carbon nanotubes
AssigneeInternational Business Machines Corporation
InventorsQing Cao, Dechao Guo, Shu-Jen Han, Yu Lu, Keith Kwong Hon Wong
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AssigneeInternational Business Machines Corporation
InventorsQing Cao, Dechao Guo, Shu-Jen Han, Yu Lu, Keith Kwong Hon Wong
Estimating the term…
A fin structure including a vertical alternating stack of a first isoelectric point material layer having a first isoelectric point and a second isoelectric material layer having a second isoelectric point less than the first isoelectric point is formed. The first and second isoelectric point material layers become oppositely charged in a solution with a pH between the first and second isoelectric points. Negative electrical charges are imparted onto carbon nanotubes by an anionic surfactant to the solution. The electrostatic attraction causes the carbon nanotubes to be selectively attached to the surfaces of the first isoelectric point material layer. Carbon nanotubes are attached to the first isoelectric point material layer in self-alignment along horizontal lengthwise directions of the fin structure. A transistor can be formed, which employs a plurality of vertically aligned horizontal carbon nanotubes as the channel.
A method of forming a structure comprising:
Dependencies are inferred from the claim text.