Chemical vapor deposition apparatus and method of forming semiconductor epitaxial thin film using the same

A chemical vapor deposition apparatus comprising:

• a reaction chamber including an inner tube having a predetermined volume of an inner space, and an outer tube tightly sealing the inner tube;
• a wafer holder disposed within the inner tube and on which a plurality of wafers are stacked at predetermined intervals;
• a gas supply unit including at least one gas line supplying an external reaction gas to the reaction chamber, and a plurality of spray nozzles communicating with the gas line to spray the reaction gas to the wafers, whereby semiconductor epitaxial thin films are grown on the surfaces of the wafers;
• and
• a guide unit disposed between the spray nozzles and the wafers, the guide unit guiding the flow of the reaction gas so that the reaction gas sprayed from the spray nozzles flows to the top and bottom surfaces of the respective wafers,
• wherein the semiconductor epitaxial thin film grown on the surface of the wafer includes a light emitting structure in which a first-conductivity-type semiconductor layer, an active layer, and a second-conductivity-type semiconductor layer are sequentially formed.