Method for fabricating semiconductor layer having textured surface and method for fabricating solar cell
AssigneeIndustrial Technology Research Institute
InventorsTeng-Yu Wang, Chien-Hsun Chen, Chen-Hsun Du, Chung-Yuan Kung
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Abstract
The disclosure provides a method for fabricating a semiconductor layer having a textured surface, including: (a) providing a textured substrate; (b) forming at least one semiconductor layer on the textured substrate; (c) forming a metal layer on the semiconductor layer; and (d) conducting a thermal process or a low temperature process to the textured substrate, the semiconductor layer and the metal layer, wherein the semiconductor layer is separated from the textured substrate by the thermal process to obtain the semiconductor layer having the metal layer and a textured surface.
Claims17
A method for fabricating a semiconductor layer having a textured surface, comprising:
- (a) providing a textured substrate;
- (b) forming at least one semiconductor layer on the textured substrate;
- (c) forming a metal layer on the semiconductor layer;
- and
- (d) conducting a low temperature process to the textured substrate, the semiconductor layer and the metal layer, wherein the semiconductor layer is separated from the textured substrate by the low temperature process to obtain the semiconductor layer having the metal layer and a textured surface.
A method for fabricating a solar cell, comprising:
- (a-2) providing a textured substrate;
- (b-2) forming at least one silicon layer on the textured substrate;
- (c-2) forming a metal layer on the silicon layer;
- (d-2) conducting a low temperature process to the textured substrate, the silicon layer and the metal layer, wherein the silicon layer is separated from the textured substrate by the low temperature process to obtain the silicon layer having the metal layer and a textured surface;
- (e-2) forming an anti-reflection layer on the silicon layer having a textured surface;
- and
- (f-2) forming an electrode layer on the anti-reflection layer.
Dependencies are inferred from the claim text.