High density capacitor integrated into focal plane array processing flow
AssigneeDRS RSTA, Inc.
InventorsKirk D. Peterson, Eugene E. Krueger, Cari A. Ossenfort, Daniel B. Jardine, George D. Skidmore
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Abstract
Methods and structures of photodetectors are described. The structure may include a readout integrated circuit substrate having an internally integrated capacitor. The structure may additionally include an external capacitor overlying the readout integrated circuit substrate. The external capacitor may be coupled with the internally integrated capacitor of the readout integrated circuit substrate, and configured to operate in parallel with the internally integrated capacitor of the readout integrated circuit substrate. The structure may also include a detector overlying the external capacitor.
Claims7
A method of forming a photodetector, the method comprising:
- forming an external capacitor over a substrate, wherein the external capacitor is electrically coupled with the substrate, and wherein the substrate comprises an internally integrated capacitor;
- and
- forming a photodetector over the external capacitor.
Dependencies are inferred from the claim text.