Patterned substrate for light emitting diode and light emitting diode employing the same
AssigneeSeoul Viosys Co., Ltd.
InventorsYeo Jin Yoon, Won Cheol Seo
Life of this patent
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Abstract
Disclosed herein are a patterned substrate for a light emitting diode and a light emitting diode employing the patterned substrate. The substrate has top and bottom surfaces. Protrusion patterns are arranged on the top surface of the substrate. Furthermore, recessed regions surround the protrusion patterns. The recessed regions have irregular bottoms. Thus, the protrusion patterns and the recessed regions can prevent light emitted from a light emitting diode from being lost due to the total reflection to thereby improve light extraction efficiency.
Claims4
A method of manufacturing a substrate for a light emitting diode, comprising:
- preparing a substrate having flat top and bottom surfaces;
- forming a first mask pattern on the top surface to define first recessed regions;
- partially etching the substrate using the first mask pattern as an etching mask to form the first recessed regions;
- removing the first mask pattern;
- forming a second mask pattern on the top surface to define second recessed regions partially overlapping the first recessed regions;
- and
- partially etching the substrate using the second mask pattern as an etching mask to form the second recessed regions.
A method of fabricating a light emitting diode, comprising:
- preparing a substrate having flat top and bottom surfaces;
- forming a first mask pattern on the top surface to define first recessed regions;
- partially etching the substrate using the first mask pattern as an etching mask to form the first recessed regions;
- removing the first mask pattern;
- forming a second mask pattern on the top surface to define second recessed regions partially overlapping the first recessed regions;
- partially etching the substrate using the second mask pattern as an etching mask to form the second recessed regions;
- forming a first conductive type semiconductor layer, an active layer and a second conductive type semiconductor layer on the substrate with the second recessed regions formed thereon;
- and
- patterning the second conductive type semiconductor layer and the active layer to expose a region of the first conductive type semiconductor layer.
Dependencies are inferred from the claim text.