Method of attaching wafer to sheet

A wafer attaching method of attaching a wafer having a warp to a sheet by using a resin bonding apparatus having preset attaching conditions suitable for either a concave surface or a convex surface of said wafer due to said warp, said wafer attaching method comprising:

• a wafer warp detecting step of measuring a surface shape of said wafer to detect said concave surface or said convex surface as a predetermined surface;
• a wafer positioning step of mounting said sheet on a stage of said resin bonding apparatus after performing said wafer warp detecting step, next supplying a liquid resin onto said sheet, and next positioning said wafer above said liquid resin so that said predetermined surface of said wafer detected by said wafer warp detecting step is opposed to said liquid resin according to said attaching conditions;
• and
• a wafer attaching step of pressing said wafer against said liquid resin after performing said wafer positioning step to thereby spread said liquid resin over said predetermined surface of said wafer, next removing the pressure applied to said wafer, and next applying light to said liquid resin to cure said liquid resin, thereby attaching said predetermined surface of said wafer through said liquid resin to said sheet.