Method of creating two-sided template from a single recorded master
AssigneeSeagate Technology LLC
InventorsDavid Kuo, Gennady Gauzner, Kim Yang Lee
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Abstract
The embodiments disclose a method of creating two-sided template from a single recorded master, including fabricating a first template using a single recorded master, wherein the first template has a changed duty cycle and an unchanged servo arc orientation, creating a replicate of the first template, wherein the replicate has a mirrored servo arc orientation and a changed duty cycle and fabricating a second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle for imprinting on a second side of a patterned stack.
Claims20
A method of creating two-sided template from a single recorded master, comprising:
- fabricating a side A first template using a single recorded side A master, wherein the side A first template has a changed duty cycle and an unchanged servo arc orientation;
- creating a replicate of the first template, wherein the replicate has a mirrored servo arc orientation and a changed duty cycle;
- fabricating a side B second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle;
- and
- using a mix of reverse tone, imprint and etch processes to create the side A first template etched substrate and the side B second template etched substrate for use in fabricating a two-sided patterned stack.
An apparatus, comprising:
- means for fabricating a side A first template using a single recorded side A master to create a replicate;
- means for creating a replicate of the side A first template to mirror the servo arc orientation and reverse the duty cycle;
- means for fabricating a side B second template using the replicate to produce a predetermined mirrored servo arc orientation and a predetermined duty cycle of the single recorded master;
- and
- means for using a mix of reverse tone, imprint and etch processes to create the side A first template etched substrate and the side B second template etched substrate for use in fabricating two-sided patterned stacks.
The apparatus of 12, further comprising means for using a single recorded master to create a first template using a reverse tone process.
The apparatus of 12, further comprising means for creating a replicate of the first template using imprint lithography.
The apparatus of 12, further comprising means for using the replicate to fabricate a second side template using a reverse tone process to produce the predetermined mirrored servo arc orientation and predetermined duty cycle of the single recorded master.
The apparatus of 12, further comprising means for mixing reverse tone and imprint lithography processes to create a family of first side and second side templates for use in the two-sided fabrication of patterned stacks.
A second side template, comprising:
- a predetermined mirrored servo arc orientation;
- and
- a predetermined duty cycle, wherein the predetermined mirrored servo arc orientation and the predetermined duty cycle are created using a single recorded master for two-sided fabrication of patterned stacks.
Dependencies are inferred from the claim text.