Group 3a ink and methods of making and using same
AssigneeRohm and Haas Electronic Materials LLC
InventorsKevin Calzia, David W. Mosley
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Abstract
A Group 3a ink, comprising, as initial components: a polyamine solvent; a Group 3a material/organic complex; and, a reducing agent; wherein the molar concentration of the reducing agent exceeds the molar concentration of the Group 3a material/organic complex; wherein the Group 3a ink is a stable dispersion and wherein the Group 3a ink is hydrazine and hydrazinium free. Also provided are methods of preparing the Group 3a ink and of using the Group 3a ink to deposit a Group 3a material on a substrate for use in a variety of semiconductor applications, such as metallization of silicon devices in VLSI technology, the growth of semiconducting III-V alloys, thin film transistors (TFTs), light emitting diodes (LEDs); and infrared detectors.
Claims8
A Group 3a ink, comprising, as initial components:
- a polyamine solvent;
- a Group 3a material/organic complex, wherein the Group 3a material/organic complex is a Group 3a material/carboxylate complex comprising an indium cation complexed with at least one carboxylate anion selected from 2-ethylhexanoate, 2-ethylbutyrate, acetylacetonoate, trimethylacetate, acetate, formate and isovalerate;
- and,
- a reducing agent selected from ammonium formate, formic acid, ammonium oxalate, heptaldehyde and oxalic acid;
- wherein the molar ratio to the Group 3a material/organic complex is at least 10:1;
- wherein the Group 3a ink is a stable dispersion and wherein the Group 3a ink is hydrazine and hydrazinium free.
A method of preparing a Group 3a ink, comprising:
- providing a Group 3a material/organic complex;
- providing a reducing agent selected from ammonium formate, formic acid, ammonium oxalate, heptaldehyde and oxalic acid;
- providing a polyamine solvent;
- combining the Group 3a material/organic complex, the reducing agent and the polyamine solvent to produce the Group 3a ink;
- wherein at least 10 molar equivalents of the reducing agent is provided relative to the Group 3a material/organic complex;
- wherein the Group 3a ink is a stable dispersion;
- and wherein the Group 3a ink is hydrazine and hydrazinium free.
Dependencies are inferred from the claim text.