Hollow polymeric-alkaline earth metal oxide composite
AssigneeRohm and Haas Electronic Materials CMP Holdings, Inc.
InventorsAndrew R. Wank, Donna M. Alden, David B. James
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Abstract
The invention provides a plurality of polymeric particles embedded with alkaline-earth metal oxide. The gas-filled polymeric microelements have a shell and a density of 5 g/liter to 200 g/liter. The shell has an outer surface and a diameter of 5 μm to 200 μm with the outer surface of the shell of the gas-filled polymeric particles having alkaline-earth metal oxide-containing particles embedded in the polymer. The alkaline-earth metal oxide-containing particles have an average particle size of 0.01 to 3 μm distributed within each of the polymeric microelements to coat less than 50 percent of the outer surface of the polymeric microelements.
Claims8
A plurality of polymeric particles embedded with alkaline-earth metal oxide comprising:
- gas-filled polymeric microelements, the gas-filled polymeric microelements having a shell and a density of 5 g/liter to 200 g/liter, the shell having an outer surface and a diameter of 5 μm to 200 μm and the outer surface of the shell of the gas-filled polymeric particles having alkaline-earth metal oxide-containing particles embedded in the polymer, the alkaline-earth metal oxide-containing particles having an average particle size of 0.01 to 3 μm;
- the alkaline-earth metal oxide-containing particles distributed within each of the polymeric microelements, the alkaline-earth metal oxide-containing regions being spaced to coat less than 50 percent of the outer surface of the polymeric microelements;
- and less than 0.1 weight percent total of the polymeric microelements being associated with i) alkaline-earth metal oxide-containing particles having a particle size of greater than 5 μm;
- ii) alkaline-earth metal oxide-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements;
- and iii) polymeric microelements agglomerated with alkaline-earth metal oxide-containing particles to an average cluster size of greater than 120 μm.
A plurality of polymeric particles embedded with alkaline-earth metal oxide comprising:
- gas-filled polymeric microelements, the gas-filled polymeric microelements having a shell and a density of 10 g/liter to 100 g/liter, the shell having an outer surface and a diameter of 5 μm to 200 μm and the outer surface of the shell of the gas-filled polymeric particles having alkaline-earth metal oxide-containing particles embedded in the polymer, the alkaline-earth metal oxide-containing particles having an average particle size of 0.01 to 2 μm;
- the alkaline-earth metal oxide-containing particles distributed within each of the polymeric microelements, the alkaline-earth metal oxide-containing regions being spaced to coat 1 to 40 percent of the outer surface of the polymeric microelements;
- and less than 0.1 weight percent total of the polymeric microelements being associated with i) alkaline-earth metal oxide-containing particles having a particle size of greater than 5 μm;
- ii) alkaline-earth metal oxide-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements;
- and iii) polymeric microelements agglomerated with alkaline-earth metal oxide-containing particles to an average cluster size of greater than 120 μm.
Dependencies are inferred from the claim text.