Turbomolecular pump, and particle trap for turbomolecular pump

A turbomolecular pump, comprising:

• a rotor formed with rotating blades in a plurality of stages, and rotating at high speed;
• a plurality of fixed blades arranged along axial direction of the pump so as to alternate with respect to the rotating blades;
• a pump housing containing the rotating blades and the fixed blades, and formed with an inlet opening;
• a circular disk, provided close to the rotor on the inlet opening side, and arranged so as to oppose a surface on the rotor more radially inward than a root portion of the rotating blades;
• and
• a mesh structure provided along the pump housing inner wall and having a laminated construction comprising a plurality of layers each being interlaced with fine wires.

A particle trap for a turbomolecular pump, comprising:

• a casing that comprises a first flange connected to a flange of an inlet opening of the turbomolecular pump and a second flange that is connected to a flange of an outlet opening of a vacuum device;
• a cylindrical mesh structure, disposed in the casing interior, and made by interlacing fine wires so as to capture in its interior particles that have been struck by a rotor of the turbomolecular pump and have bounced off it;
• and
• a plurality of plate shaped mesh structures disposed so as to extend radially with respect to the cylindrical mesh structure, and provided along axial direction of the first and second flanges.

A turbomolecular pump, comprising:

• a rotor formed with rotating blades in a plurality of stages, and rotating at high speed;
• a plurality of fixed blades arranged along axial direction of the pump so as to alternate with respect to the rotating blades;
• a pump housing containing the rotating blades and the fixed blades, and formed with an inlet opening;
• a circular disk, provided close to the rotor on the inlet opening side, and arranged so as to oppose a surface on the rotor more radially inward than a root portion of the rotating blades;
• and
• a cylindrical mesh structure disposed between the inlet opening and the rotor, the cylindrical mesh structure having a laminated construction comprising a plurality of layers each being interlaced with fine wires,
• wherein particles that are struck by the rotor and bounce off it are captured internally in the cylindrical mesh structure.

A particle trap for a turbomolecular pump, comprising:

• a casing that comprises a first flange connected to a flange of an inlet opening of the turbomolecular pump and a second flange that is connected to a flange of an outlet opening of a vacuum device;
• and
• a cylindrical mesh structure disposed in the casing interior and having a laminated construction comprising a plurality of layers each being interlaced with fine wires,
• wherein particles that are struck by the rotor and bounce off it are captured internally in the cylindrical mesh structure.