Automated dewpoint oxygen measurement system
AssigneeUnited Technologies Corporation
InventorsManfried Carl Verch, Jr., Peter N. Horniak
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Abstract
An apparatus and method to automate the process of measuring and verifying trace gas levels such as oxygen and dewpoint inside a retort used to coat or heat treat substrates are provided. The apparatus may include an integrated measuring system, and an operator interface. The method may include coupling the apparatus to the retort in which the substrate is coated or heat treated, activating the integrated measuring system to measure and verify atmospheric conditions within the retort, and providing operator access to process parameters and status through the operator interface. The measurement and verification system may be completely autonomous.
Claims20
An apparatus for automating dewpoint and oxygen level verification within a retort for coating or heat treating substrates, the apparatus comprising:
- an integrated measuring system, the integrated measuring system being communicatively coupled to the retort, and measuring dewpoint and oxygen levels inside the retort, the retort comprising a site for substrate processing;
- and
- an operator interface communicatively coupled to the integrated measuring system, the operator interface automatically communicating whether the dewpoint and oxygen levels inside the retort are within an acceptable range.
A method for automating dewpoint and oxygen level verification within a retort for coating or heat treating substrates, the method comprising the steps of:
- a.) providing an apparatus comprising
- i. an integrated measuring system, the integrated measuring system being communicatively coupled to the retort, and measuring dewpoint and oxygen conditions inside the retort, and
- ii. an operator interface communicatively coupled to the integrated measuring system, the operator interface automatically communicating whether the dewpoint and oxygen levels inside the retort are within an acceptable range;
- b.) purging the retort with an inert gas;
- c.) activating the integrated measuring system;
- and
- d.) verifying dewpoint and oxygen levels within the retort using the integrated measuring system.
An apparatus for automating dewpoint and oxygen level verification within a retort for coating or heat treating substrates prior to coating or heat treating, the apparatus comprising:
- a dewpoint sensor;
- an oxygen sensor;
- a processor receiving signals from the dewpoint sensor and oxygen sensor indicative of dewpoint and oxygen levels inside of the retort, respectively, the retort being purged with an inert gas;
- and an operator interface automatically communicating whether dewpoint and oxygen levels within the retort are within an acceptable range.
Dependencies are inferred from the claim text.