Device for controlling temperature of an optical element
AssigneeCarl Zeiss SMT GmbH
InventorMarkus Hauf
Life of this patent
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Abstract
A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for heating the optical element. The heating part is connected to the controller for controlling the temperature of the heating part. The resulting device for controlling temperature in particular can be used with an optical element in a EUV microlithography tool leading to a stable performance of its optics.
Claims20
A system, comprising:
- a cooling device comprising a radiational cooling element disposed away from an optical element, the radiational cooling element being configured to cool the optical element by radiation heat transfer;
- a heating device configured to heat the optical element;
- and
- a controller configured to control a temperature of:
- a) the radiational cooling element;
- or b) the heating device,
- wherein the system is configured to control a temperature of the optical element when the optical element is in a vacuum atmosphere.
An optical system, comprising:
- a plurality of optical elements including a first optical element;
- a radiational cooling element disposed away from the first optical element, the radiational cooling element being configured to cool the first optical element by radiation heat transfer;
- a heating device configured to heat the first optical element;
- and
- a controller configured to control a temperature of:
- a) the radiational cooling element;
- or b) the heating device,
- wherein the system is a microlithography optical system, and the first optical element is in a vacuum atmosphere.
Dependencies are inferred from the claim text.